SRP-4 探头规格 |
准确度:±5%参考标准片 精确度:化学铜:标准差0.2 %,电镀铜:标准差0.3 % 分辨率:0.1μm≥10μm,0.01μm<10μm,0.001μm<1μm,0.01mils≥1 mil,0.001mils<1mil 厚度测量范围:化学铜:0.25μm–12.7μm(10μin–500μin) 电镀铜:2.5μm–254μm(0.1mil–10mil) 线性铜线宽范围:203μm–7620μm(8mil–300mil) |
ETP 探头规格 |
准确度:±5%参考标准片 精确度:1.2 mil 时,1.0% (典型情况下) 分辨率:0.01 mils (0.25 μm) 电涡流:遵守ASTM E37696 标准的相关规定 测量厚度范围:0.08 - 4.0 mils (2 - 102 μm) 孔最小直径:35 mils (899 μm) 孔径范围: 0.899 mm-3.0 mm |